Abstract:
Electron energy loss spectroscopy (EELS) is a technique to investigate the physical
properties of material. Using this technique it is possible to detect the presence
of a specific element in a specimen. When used in combination with an electron microscope,
energy filtered images may be obtained, which in principle may be used to quantify
the local element concentration. This involves a process of background correction,
conventionally performed assuming a specific parametric behavior of the spectral intensity
as a function of electron energy loss. In this article a parameter-free method is
described for background correction based on the formalism of correspondence analysis.
Such a method may be used in parts of the spectrum where the functional dependence
of the spectral intensity is unknown. Use of this method for element detection has
been suggested before. This article reports simulation experiments suggesting its
suitability for quantitative determination of element distributions and element concentrations.
Keywords
Electron Microscopy - Electron Energy Loss Spectroscopy - Correspondence Analysis
- Image Sequences
