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Synfacts 2009(10): 1091-1091  
DOI: 10.1055/s-0029-1217939
Synthesis of Materials and Unnatural Products
© Georg Thieme Verlag Stuttgart ˙ New York

Green Lithography

Contributor(s): Timothy M. Swager, Trisha L. Andrew
M. Tanaka, A. Rastogi, G. N. Toepperwein, R. A. Riggleman, N. M. Felix, J. J. de Pablo, C. K. Ober*
Cornell University, Ithaca and University of Wisconsin, Madison, USA
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Publication History

Publication Date:
22 September 2009 (online)

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Significance

Fluorinated quaternary ammonium salts (QASs) were synthesized to act as dissolution aids for polar polymers in nonpolar supercritical carbon dioxide (scCO2). QAS/scCO2 mixtures were used as the processing solvent to develop a pattern established by electron-beam lithography and were found to yield well-resolved nanostructures, comparable to those afforded by conventional development solvents.